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Latest update: 15/09/2022 12:22:14

Tsubasa Vacuum RIKEN Co., Ltd.

By utilizing our own vacuum deposition technology, we solve clients' problems.

We have been involved in the semiconductor industry for many years. During the period, we have established vacuum deposition technology for protecting dry etching equipment parts from fluorine plasma. The technology is expected to increase the operating time of dry etching equipment, improve the production yield, and reduce maintenance costs.



Corporate name Tsubasa Vacuum RIKEN Co., Ltd.
Representative Michio Ishikawa
Corporate website
Capital 12,000,000 Yen
Number of Employees 5 (Number of full-time employees: 5)
Established date 02, 2019
Head office: Country Japan
Head office: Address Keio Fujisawa Innovation Village. 4489-105 Endo, Fujisawa-shi,, Kanagawa Prefecture, 2520816
Industry Miscellaneous manufacturing industries
Main phone number 0466538727

Client & Business location info

Key Production Center (Factory) Yokohama Laboratory