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Latest update: 27/04/2021 14:08:34

Kojima Instruments Inc.


Digital mass flow device which is adopted the own developed both stable high speed thermal sensor and small proportional solenoid valve and is realized high accuracy and quick response with RS 485 communication in spite of compact.

EXE-FLOW was commercialized “Exact measurement” and “Excellent function as a concept. This is covered from small flow rate (F.S.10sccm) to large flow rate (F.S.200slm) and the 11 flow ranges are ready as s standard stock.