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Latest update: 27/04/2017 14:21:01

FTS Corporation Co., Ltd.

We are developing our original thin film forming technology and equipment business in Japan and abroad.

We supply a new kind of facing target-type sputtering equipment in Japan and abroad. This product is a low-temperature, low-damage method for reliably creating quality thin films. We do business with major domestic Japanese companies such as Honda, Nissan Motor, Murata Mfg., NGK Insulators, and Panasonic. We have a track record of overseas business with Samsung Electronics. We have product line-ups for fundamental research, R&D, and mass production according to customer needs. We also sell reflective-type clear heat insulation film. We provide R&D support services using our new facing target-type sputtering equipment, and R&D support services for thin film materials and MEMS devices.


Other presentation

[Company strength]
We have product line-ups featuring our new NFTS facing target-type sputtering equipment for fundamental research, R&D, and mass production according to the purpose of use and the customer’s target stage. We have developed a large-scale plasma source. We can apply this development principle to both small equipment for fundamental research and large equipment for mass production. This is how we can supply consistent film-forming technology to our customers, and contribute to reducing the time necessary for commercialization. We have also prepared an extensive line-up in order to support customer needs for particular types of film-forming substrates and methods. Our specialist group will quickly provide support from research studies to introduction of a production system.

[Business description]
Our company offers a new kind of low-temperature, low-damage facing target-type sputtering called NTFS (New Facing Targets Sputtering). We sell NFTS equipment and reflective-type clear heat insulation film. We also provide R&D support services using NFTS equipment, and R&D support services for thin film materials and MEMS devices.

Vacuum equipment design, manufacturing, and sales

[Strength of products/technologies]
The damage caused by bombarding an accumulated substrate with high-energy particles (recoil particles, ions, and electrons) can be mitigated by restricting the high-density plasma into a box-type space. This is the principle and structure of our new NFTS facing target-type sputtering technology for film forming. NFTS technology can be applied as a low-temperature, low-damage method to form high-quality film, which had been considered difficult to realize with conventional sputtering technology. This is a high-productivity film-forming technology. Film formed with our NFTS technology has smaller gaps in the particle interface and improved precision compared to film formed with conventional sputtering technology.

[Representative's message]
There are many problems in the field of next-generation devices for achieving oxide films, compound oxidation films, and atom-order nano multilayer films at a low temperature and with high quality. System development including our NFTS plasma source is most appropriate for solving these issues. We want to contribute to the development of society by forming development partnerships in Japan and abroad.

[Company structure for market development/overseas expansion]
Our corporate scale is small, so we specialize in business expansion mainly using the Internet. We cultivate sales in partnership with outsourcing enterprises and related major enterprises. We are also working to improve awareness of our products through exhibitions, and so on.

[Market share/Ranking]
Our technology has been adopted in the R&D field as a problem-solving technology for CVD and magnetron sputtering film quality and productivity.

[Awards and media coverage]
Venture Fair Japan 1998, Examiner’s Encouragement Award; Sanwa High-Tech Venture Development Foundation; Fuji New Business Nurturing Fund.


[Joint research and development]
Japan Steel Works: Joint development of NFTS mass-production equipment (December 2008).

[Main Clients / Business History (domestic)]
Honda Engineering: NFTS equipment for compound solar cell development.Nissan Motor: NFTS equipment for film fuel cell development.Murata Mfg./NGK Insulators: NFTS equipment for next-generation functional part development.Panasonic: NFTS plasma sources, and so on.

[Main Clients / Business History (overseas)]
Samsung Electronics: NFTS plasma sources.

This company is recommended by the following support organizations.

Kanto Head Office, SMRJ