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Latest update: 30/11/2016 18:46:47

Elionix Inc.

We sell our particle beam and electromagnetic wave devices and systems worldwide. 

We are a device and system manufacturer that distributes products both in Japan and overseas. Our products utilize particle beam (e.g., electron, ion) and electromagnetic wave (e.g., light, X-ray) technologies. They are supplied to universities, research institutions, and public institutions. We have delivered products to the University of Tokyo, Kyoto University, Japan Aerospace Exploration Agency (JAXA), and Japan Science and Technology Agency (JST), in addition to around 240 private companies. Our products are exported to Europe and the US as well as to regions in Asia, such as China, Taiwan, Korea, and Singapore. Our strength lies in our technology and development capabilities. Our electron beam lithography system is a system for reproducing shapes much smaller than a semiconductor. This is done by irradiating an electron beam on a silicone substrate or other objects. It can evenly draw more than 1 million lines on a one-cubic-centimeter cup. 

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[Company strength]
Our company’s brand was established through nano-level micro fabrication technology. Our electron beam lithography system is a nanofabrication system that reproduces shapes smaller than semiconductors by irradiating an electron beam on a silicone substrate or other objects. It can evenly draw more than 1 million lines on a one-cubic-centimeter cup. The highest-end model can draw with a minimum line width of 5 nanometers. The main users are universities, and research institutions.

[Business description]
We conduct R&D, design, manufacturing, technical support, imports and exports, and maintenance services for various devices and systems incorporating particle beams (e.g., electrons, ions) or electromagnetic waves (e.g., light, X-rays). Our company was established by a group of electronics engineers from a major electron microscope manufacturer. Our founders wanted to contribute to the progress of technology through product development. We have been making the most of the potential of our location in Hachioji City, which is in the western part of the Tokyo metropolitan area, in joint research projects. These have included many local science and engineering universities, research institutions, and development departments of major manufacturers through industry-university-government collaboration, and they brought about the significant success we enjoy today. 

[Industry]
Nanofabrication system development, manufacturing, and sales 

[Strength of products/technologies]
ELS-F125 ultra-high-precision electron beam lithography system.
(1) You can obtain a stable, small-diameter beam of diameter 1.7 nm (minimum) for a long time through an acceleration voltage of up to 125 kV, which is a world-first. This allows for ultra-fine pattern drawings with line widths of 5 nm (or 4 nm) even with commercially available resist solution. 
(2) The ultra-high-acceleration voltage (125 kV) enables ultra-fine pattern drawings with a high aspect ratio. 
(3) The electron optics system for controlling the electron beam was modified to reduce distortion, and to significantly expand the drawing area. This has also reduced processing time by a large margin.
(4) We modified the electron optics system and greatly improved precision in the aligned connection and overlaps. This product evenly draws highly precise lines over a large area.


[Representative's message]
Our company has an extensive lineup of fabrication, observation, analysis, and measurement systems at the nanometer order. This has allowed us to earn a reputation as a specialist in nanotechnology. We intend to offer these systems to researchers around the world, while enhancing performance to the highest level. We will satisfy customers with the best customer service so that we can establish our company as a global brand. 

[Company structure for market development/overseas expansion]
Sales activities for overseas customers are conducted by five overseas sales representatives (one of them works only in the office) and local sales agencies. Our production division ships our products and provides after-sales service, but we provide training so that consumables are regularly replaced by the local sales agencies. The main product that we are promoting is our high-value-added electron beam lithography system. We plan to target well-known universities first, and then accumulate a good operating record and trust before expanding to other universities and research institutions.

[Market share/Ranking]
Our ultra-high-precision electron beam lithography system has acquired 80% of the domestic Japanese market.

[Awards and media coverage]
[Awards]
Global Niche Top Companies Selection 100, Ministry of Economy, Trade, and Industry (METI) (March 2014); 300 of Japan's Vibrant Monozukuri (Manufacturing) SMEs, Small and Medium Enterprise Agency, METI (April 2006); many others. 

[Media]
Nikkan Kogyo Shimbun (August 2015, and other occasions); BS-TBS, “Global Navi Front” news program (March 2014); Nikkei newspaper (April 2013, and other occasions). 


[Joint research and development]
Nagaoka University of Technology: Joint development of press-type ultra-micro hardness tester. 
National Institute of Advanced Industrial Science and Technology (R&D program in support of local SMEs): Joint development of software for enhancing a press-type ultra-micro hardness tester.
Hokkaido University: Joint development of nanostructure fabrication technology through ion beam irradiation.
Science University of Tokyo: Joint manufacturing of 3D mold fabrication on nanoimprinting.


[Main Clients / Business History (domestic)]
Our products are delivered to public institutions (e.g., Japan Aerospace Exploration Agency, Japan Science and Technology Agency), and educational institutions (e.g., the University of Tokyo, Kyoto University). We also deliver to around 240 private companies. 

[Main Clients / Business History (overseas)]
Our products are shipped to research institutions and universities in the US, Europe, Singapore, Korea, Taiwan, and China. 

This company is recommended by the following support organizations.

一般社団法人首都圏産業活性化協会
Kanto Head Office, SMRJ
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